Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
نویسندگان
چکیده
Peter Petrik,1,∗ Nitish Kumar, Miklos Fried, Balint Fodor, Gyorgy Juhasz, Silvania F. Pereira, Sven Burger and H. Paul Urbach Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, H-1121 Budapest, Konkoly Thege u. 29-33 Optics Research Group, Department of Imaging Physics, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands Zuse Institute Berlin (ZIB), Takustrasse 7, D-14195 Berlin, Germany ∗Corresponding author: [email protected]
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